Minimal detectable leak rate for He | 7.5 x 10-8 Torr l/s (sniffing) |
3.75 x 10-12 Torr l/s (vacuum) | |
Applications | semiconductor industry • large area coating • solar industry • accelerators • vacuum components (feedthroughs, valves, bellows, expansion joints) • laser technology • ultra-pure media supply • electronics • aeronautics • medical technology |