Leybold Dry Vacuum Pumps

Dry pumps compress gas without any oil in the pumping chamber. That means no oil to change or dispose of, no oil mist at the exhaust and no oil backstreaming into the process. Leybold offers several dry pump families, from compact multi-stage Roots pumps for labs to large screw pumps for semiconductor, coating and industrial processes. At Provac Sales, we supply Leybold dry pumps and repair and rebuild them in our shop.

Leybold Dry Pump Models We Carry

DRYVAC Dry Screw Pumps

• DRYVAC DV 450 and DV 650, plus C versions for harsh processes and S versions for special duty
• DRYVAC DV 1200 and DV 1200 S, about 1,250 m³/h (736 CFM) nominal speed
• DRYVAC DV 5000 and DV 5000 C for very large systems

DRYVAC pumps reach about 5 x 10⁻³ mbar on the larger models and are designed to pair directly with RUVAC Roots blowers.

SCREWLINE Dry Screw Pumps

• SCREWLINE SP 250, SP 630 and SP 630 F for coating, industrial and furnace applications

LEYVAC Dry Screw Pumps

• LEYVAC LV 80, about 80 m³/h at 50 Hz and 96 m³/h at 60 Hz
• LEYVAC LV 140, about 125 m³/h at 50 Hz and 145 m³/h at 60 Hz
• LEYVAC LV 250

LEYVAC pumps reach about 1 x 10⁻² mbar and are a compact dry option for coating, analytical and R&D systems.

CLAWVAC Claw Pumps

• CLAWVAC CP 65, CP 150 and CP 300 for rough vacuum in industrial processes

ECODRY plus Multi-Stage Roots Pumps

• ECODRY 40 plus and ECODRY 65 plus, with maximum pumping speeds of about 40 and 55 m³/h

Older DRYVAC P Series

• DRYVAC 25 P, 50 P and 100 P

Some listings show a price and others are quote-based. Each product page lists pumping speed, ultimate pressure, motor and connections. For oil-free scroll and diaphragm pumps, see our Leybold scroll pumps and diaphragm pumps collections.

Which Dry Pump Technology Fits Your Process?

• Dry screw pumps, such as DRYVAC, SCREWLINE and LEYVAC, have two intermeshing screws that move gas from inlet to exhaust. They handle vapors, particles and fast cycling well and are the most common choice for coating, semiconductor and industrial work.
• Claw pumps, such as CLAWVAC, use claw-shaped rotors and suit rough vacuum duties like packaging, conveying and holding, where very low pressure is not needed.
• Multi-stage Roots pumps, such as ECODRY plus, push gas through several Roots stages in series. They are quiet and compact, with an ultimate pressure below about 0.01 to 0.03 mbar, and suit labs, analytical instruments and turbo backing.

C, S and Industrial Versions

Many DRYVAC models come in versions matched to the process:

• Standard versions for clean processes such as load locks and coating
• C versions with features for corrosive and harsh processes, often run with PFPE oil, such as LEYBONOL LVO 410, in the bearings and gears
• S versions for special duties with higher gas loads or particles

Choose the version based on your process gases and by-products, not just pumping speed.

Key Features

• No oil in the pumping chamber, so no oil changes in the process path and no oil mist
• Gears and bearings sealed from the pumping chamber
• Integrated controllers and interfaces on DRYVAC and LEYVAC models
• Frequency control on many models to match speed to the process and save energy
• Water cooling on larger screw pumps for stable temperatures
• Designed to pair with RUVAC Roots blowers for higher speed at low pressure

Applications

• Semiconductor, solar and display manufacturing
• Large-area glass, web and decorative coating
• Load locks and transfer chambers
• Vacuum furnaces and metallurgy
• Freeze drying, chemical and pharmaceutical processes
• Packaging, conveying and holding with CLAWVAC
• Laboratory, analytical instruments and turbo backing with ECODRY plus

How to Choose the Right Leybold Dry Pump

Before ordering, confirm:

• Ultimate and working pressure required
• Pumping speed at working pressure
• Process gases, vapors, particles and any corrosive by-products
• Whether you will add a RUVAC blower now or later
• Supply voltage, frequency and cooling water
• Cycle time and duty, such as continuous running or fast load-lock cycling

Maintenance Tips

• Check gear and bearing oil level and condition at the interval in the manual
• Keep cooling water flow and temperature in range
• Purge with nitrogen when pumping condensable or reactive gases, if the pump has a purge
• Run the pump warm before and after condensable processes to keep vapors from condensing inside
• Fit inlet screens or traps on dusty processes

Signs Your Dry Pump Needs Service

• Higher base pressure or lower pumping speed
• Rising motor current or temperature alarms
• New noise, vibration or rotor contact
• Process deposits building up inside the pump
• Oil leaks around the gear or bearing housings

New vs Rebuilt Leybold Dry Pumps

New dry pumps suit new tools and processes that need full warranty coverage. Rebuilt pumps are a cost-effective way to replace a failed pump of the same model. A dry pump rebuild usually includes cleaning process deposits from the rotors and housing, replacing bearings, seals and gear oil, checking rotor clearances and running the pump on test before shipping. Tell us what process the pump ran so we can clean and test it correctly.

Leybold Dry Pumps Repair

Provac Sales repairs and rebuilds Leybold DRYVAC, SCREWLINE, LEYVAC, CLAWVAC and ECODRY dry pumps. Submit an RMA request and complete the contamination data sheet before shipping, especially for pumps used on hazardous processes. See our pump repair page for more information.

Related Leybold Collections

• Leybold blowers and boosters, RUVAC blowers for dry pump systems
• Leybold scroll pumps, SCROLLVAC plus dry scroll pumps
• Leybold diaphragm pumps, DIVAC oil-free pumps
• Leybold oil-sealed screw pumps, VACUBE for central vacuum
• All Leybold vacuum pumps
• All dry pumps from every brand we carry

Leybold Dry Pumps FAQ

1. What is the difference between Leybold DRYVAC and LEYVAC dry pumps?

Both are dry screw pumps. DRYVAC pumps are larger industrial pumps, from the DV 450 up to the DV 5000, built to pair with RUVAC blowers. LEYVAC LV 80, LV 140 and LV 250 pumps are compact screw pumps reaching about 1 x 10⁻² mbar for coating, analytical and R&D systems.

2. What does the C mean on a DRYVAC pump?

C versions are built for corrosive and harsh processes. They are typically filled with PFPE oil in the gear and bearing chambers and are matched to processes with aggressive gases or by-products.

3. Is a dry pump better than an oil-sealed pump?

A dry pump avoids oil changes, oil mist and backstreaming, and handles many vapors and particles better. An oil-sealed pump costs less to buy. Dry pumps are usually the better choice for clean, corrosive or high-duty processes.

4. What is the ECODRY plus used for?

The ECODRY plus is a quiet multi-stage Roots dry pump with an ultimate pressure below about 0.01 to 0.03 mbar. It suits laboratories, analytical instruments and turbo pump backing.

5. Can I add a Roots blower to a Leybold dry pump?

Yes. DRYVAC and SCREWLINE pumps are commonly paired with RUVAC WA or WS blowers to increase pumping speed at low pressure. Send us your process details and we will size the combination.

Request a Quote on Leybold Dry Vacuum Pumps

Send us your required ultimate pressure, pumping speed, process gases, supply voltage and application. We will recommend the right DRYVAC, SCREWLINE, LEYVAC, CLAWVAC or ECODRY pump, confirm new or rebuilt availability, or quote a repair of your existing pump. Contact us or call 831-462-8900.