Pfeiffer Turbo Pumps

Pfeiffer has a long history in turbomolecular pump technology, and Pfeiffer turbo pumps are installed in laboratories, analytical instruments and semiconductor tools worldwide. A turbo pump uses rotor blades spinning at very high speed to drive gas molecules toward the exhaust, where a backing pump removes them, producing clean, oil-free high and ultra-high vacuum. At Provac Sales, we supply new and rebuilt Pfeiffer turbo pumps and rebuild Pfeiffer HiPace, TMH, TMU, TPH, TPU and ATH series pumps in house.

Pfeiffer Turbo Pump Models We Carry

Our Pfeiffer turbo pump collection includes:

• Pfeiffer HiPace 10 and HiPace 30, compact pumps for small systems and instruments
• Pfeiffer HiPace 60P, a HiPace pump with a compact footprint for analytical and portable systems
• Pfeiffer HiPace 350 with TC 400 electronics
• Pfeiffer SplitFlow 50, a multi-inlet pump for differentially pumped instruments
• Pfeiffer TMH-064 and TMH-065, rebuilt
• Pfeiffer TMU-064USG, rebuilt
• Pfeiffer TPH-060, TPU-060 and TPU-062, rebuilt
• Pfeiffer ATH-1300MT and Alcatel ATH-1300M, rebuilt, magnetically levitated pumps for process tools

Many listings are priced on request, because flange, electronics and cooling options vary. Each product page lists the inlet, condition and key details.

Understanding Pfeiffer Turbo Pump Families

Pfeiffer turbo pumps span several generations:

• HiPace pumps are the current generation, with attached drive electronics, hybrid bearings in most models and a wide range of sizes. The number in the name reflects the approximate nominal pumping speed in litres per second.
• TMH and TMU pumps are earlier generations widely used in instruments and research. TMH pumps have a compound or drag stage that tolerates higher backing pressures, and TMU pumps are the standard turbo design. Many have attached electronics.
• TPH and TPU pumps are older models that typically use external TCP controllers.
• ATH pumps, originally from Alcatel, use magnetic bearings and are designed for semiconductor and process duty.
• SplitFlow pumps have more than one inlet for instruments such as mass spectrometers where different stages need different pressures.

How to Choose a Pfeiffer Turbo Pump

Consider these factors:

• Pumping speed required for your gas, including light gases such as hydrogen and helium
• Target base pressure and chamber cleanliness
• Inlet flange, such as DN 40 ISO-KF, DN 63 ISO-K, DN 100 ISO-K or CF-F
• Backing pump and the turbo's maximum backing pressure
• Mounting orientation
• Cooling method, air or water
• Electronics, such as TC 110 or TC 400, and the power supply or controller needed
• Vibration sensitivity, which may favor a magnetically levitated pump
• Bake-out requirements for ultra-high vacuum

If you are replacing a pump in an instrument, start with the full model and part number from the rating plate.

Matching the Controller and Backing Pump

A turbo pump is part of a system. You will typically need:

• A compatible controller, display unit or power supply from our Pfeiffer turbo pump controllers collection
• A backing pump that holds the foreline below the turbo's maximum backing pressure, such as a Pfeiffer MVP diaphragm pump, HiScroll pump or DUO rotary vane pump
• Cables, a vent valve, an inlet screen and, if needed, a cooling unit from our Pfeiffer accessories collection

For a ready-made system, see our Pfeiffer HiCube pumping stations.

Applications for Pfeiffer Turbo Pumps

Pfeiffer turbo pumps are used in:

• Mass spectrometers, including split-flow and differentially pumped designs
• Electron microscopes and focused ion beam systems
• Surface science and ultra-high vacuum research
• Thin film deposition, sputtering and evaporation
• Semiconductor etch, deposition and metrology tools
• Helium leak detectors
• Particle accelerators, fusion research and space simulation

Protecting Your Turbo Pump

Most turbo pump failures come from conditions around the pump:

• Never vent a spinning turbo pump suddenly to atmosphere
• Use an inlet screen to keep debris away from the rotor
• Keep the backing pump in good condition
• Avoid shock and vibration while the rotor is spinning
• Follow bearing and lubricant reservoir service intervals on hybrid bearing pumps
• Maintain correct cooling and ambient temperature

New vs Rebuilt Pfeiffer Turbo Pumps

Rebuilt Pfeiffer turbo pumps are a practical way to restore an instrument without paying new-pump prices, especially for older TMH, TMU, TPH and TPU models. New HiPace pumps suit new systems or users who want current-production equipment. Each listing and quotation confirms the condition, included electronics and warranty.

Pfeiffer Turbo Pump Rebuild Service

Provac Sales rebuilds Pfeiffer ATH, TMH, TMU, TPH, TPU and HiPace series turbo pumps, along with Alcatel ATP, ATS, MDP, PTM and TMP series pumps. Our published turbo rebuild service may include cleaning, bearing and O-ring replacement, balancing and helium leak checking. Pumps with rotor damage or heavy contamination may need additional work, which we will discuss before proceeding.

Submit an RMA request, complete the contamination data sheet and pack the pump carefully with the inlet sealed. Include the controller if you suspect an electronics fault. See our pump repair page for more.

What to Send Us for a Fast Quote

• The full model and part number from the rating plate
• Serial number, when available
• Inlet flange type and size
• Attached electronics, such as TC 110 or TC 400, or the external controller model
• Cooling arrangement
• Backing pump model
• Your instrument or application
• Photos of the rating plate, inlet and connectors

About Pfeiffer Vacuum

Pfeiffer Vacuum was founded in 1890 in Wetzlar, Germany, and is known as a pioneer of turbomolecular pump technology. In 2010 the company acquired Adixen, the former Alcatel Vacuum Technology business, which is why many Alcatel and Adixen designs now carry the Pfeiffer name. The company introduced the turbomolecular pump in the late 1950s, and its turbo range has grown through the TPH, TPU, TMH, TMU and HiPace generations, with the Alcatel ATH line added after 2010.

Frequently Asked Questions

What is the difference between TMH and TMU pumps?

TMH pumps include a compound or drag stage that allows higher backing pressures, which makes them suitable for use with diaphragm backing pumps. TMU pumps are standard turbo designs that need a lower backing pressure.

Can a HiPace pump replace an older TMU pump?

Often, yes, but flange, mounting, electronics and cabling may differ. Send us your existing pump and controller details to check.

How often does a HiPace pump need service?

Hybrid bearing HiPace pumps have recommended service intervals for bearings and the lubricant reservoir. Check your manual or ask us for guidance.

Why will my turbo pump not reach full speed?

Possible causes include high backing pressure, excessive gas load, a leak, overheating, bearing wear or a controller fault. Contact us with the symptoms and model numbers.

Do you rebuild Alcatel ATH turbo pumps?

Yes. We rebuild Alcatel and Pfeiffer ATH series magnetically levitated turbo pumps, as well as other Alcatel turbo pump series. Send us the model, part number and symptoms before shipping.

Request a Quote on Pfeiffer Turbo Pumps

Send us the turbo pump model and part number, inlet flange, electronics and required condition. We will check inventory or quote a rebuild of your existing pump. Contact us or call 831-462-8900.